Leeds University Nanotechnology Microelectronics Cleanroom

The Challenge

As part of the £100m Integrated Campus for Engineering and Physical Sciences (ICEPS) at Leeds University, Dalkia Cleanrooms (formerly SPIE) was appointed by BAM Construction to deliver a turnkey microelectronics cleanroom suite. This project provided over 800m² of state-of-the-art cleanroom space, located in the basement of the ICEPS building.

This cutting-edge environment now supports research and teaching in nanotechnology and microelectronics, including activities such as etching, deposition, metrology, photolithography, packaging, post-processing, and electron beam lithography.

Technical Specification

Dalkia provided full technical design and delivery of all Architectural, Mechanical, Electrical, and Public Health services. The project featured:

• BIM Level 2 integration, including COBie asset data to support University asset management.
• ISO Class 4 & 5 cleanrooms, with ultra-precise temperature control of ±0.1°C.
• Densely serviced cleanrooms designed using 3D Revit coordination.
• Low-vibration, static-dissipative cleanroom fabric for sensitive research equipment.
• Advanced environmental systems with a mix of central air handling units and ceiling-mounted Fan Filter Units (FFUs).
• HEPA-filtered supply ventilation and air return via raised access floor and service chases.
• Full M&E systems including chilled water, vacuum, lab water, BMS, and above-ground drainage.
• Colour-controlled lighting, emergency lighting, and full access control integration.

The Build

Over 50 in-house professionals collaborated to deliver the cleanroom suite, supported by a phased construction approach that allowed early client access where required. The integration of BIM360 ensured smooth coordination between architectural and MEP systems, helping meet the demanding operational requirements of the facility.

Results

Dalkia Cleanrooms successfully delivered the Nanotechnology Microelectronics Cleanroom Suite on time and within budget. The suite now forms a critical part of Leeds University’s ICEPS initiative, enabling world-class research in one of the most advanced controlled environments in the UK.

Why Choose Dalkia Cleanrooms?

Dalkia is a leader in cleanroom and laboratory solutions, offering bespoke designs that meet the highest standards of quality, safety, and compliance.

Find out more about Dalkia’s cleanroom offers here.